An Adaptive Sparse Sampling Scheme for Scanning Electron Microscopy using Delauney Triangulation

Tim Dahmen, Patrick Trampert

In: Microscopy & Microanalysis 25. Microscopy & Microanalysis (M&M-2019) August 4-8 Portland Oregon United States Microscopy Society of America 8/2019.


Scanning Electron Microscopy (SEM) is a widely used microscopy technique with applications in fields such as material science, life science, and semiconductor research. Due to the large number of pixels in a dataset, the pixel-dwell time, which is the amount of time the electron beam illuminates a single pixel, is a crucial parameter for the aforementioned techniques. The pixel-dwell time required for a sufficiently high SNR leads to large data acquisition times, in particular for 3D techniques.

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Deutsches Forschungszentrum für Künstliche Intelligenz
German Research Center for Artificial Intelligence