Combined Tilt- and Focal-Series Tomography for HAADF-STEM

Tim Dahmen; Holger Kohr; Andrew Lupini; Jean-Pierre Beaudoin; Christian Kübel; Patrick Trampert; Philipp Slusallek; Niels de Jonge

In: Microscopy Today, Vol. 24, Pages 26-30, Microscopy Today, 5/2016.


A new aid to tomography in the scanning transmission electron microscope (STEM) is called combined tilt- and focal-series (CTFS). This software controls the recording of a tilt series where for each specimen tilt an entire focal series is recorded. This approach is particularly useful for thick specimens where the tilt range may be limited. Use of CTFS leads to a significant reduction of the missing wedge effect and a better representation of the 3D shapes of features in the specimen.

Deutsches Forschungszentrum für Künstliche Intelligenz
German Research Center for Artificial Intelligence